WebCWMP is a bidirectional protocol, providing communication between a CPE and auto-configuration servers (ACS). It includes both a safe auto-configuration and the control of … WebJul 21, 2024 · Finally, wafer edge trimming is followed by backside wafer grinding to thin the wafer, cleaning and CMP polishing, etc. Voids in the bonded wafers are checked using surface acoustic microscopy (SAM). Voids will show up as white areas, whereas a void-free bond results in a black SAM image. (Figure 4 breaks down some of bonding mechanisms.)
Chemical-mechanical polishing (CMP) - Fraunhofer Institute for Silicon
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